スパッタリングターゲット 耐摩耗性

材料

名前

Function

純度

アル

Aluminium

NCVM/Corrosion Resistance

4N, 5N, 5N5

アルミニウム合金

Aluminium Alloy

Feature-component Aesthetic

2N5, 4N, 5N

Al2O3

Aluminium Oxide

Corrosion Resistance

4N

C

Graphite

Tools plating film

3N~5N

Cr

クロム

NCVM/Corrosion Resistance

2N5, 3N, 3N5

CrAl

Chromium Aluminium

Tool Wear-resisting

2N5

CrSi

Chromium Silicon

Tool Wear-resisting

2N5

Co

Cobalt

NCVM/Corrosion Resistance

3N5

Cu Alloy

Copper Alloy

Feature-component Aesthetic

3N

Cu Alloy

Copper Alloy

Feature-component Aesthetic

3N

の

インジウム

NCVM/Corrosion Resistance

4N

InSn

Indium Tin

NCVM/Corrosion Resistance

4N

Ni

Nickel

NCVM/Corrosion Resistance

3N, 3N5, 4N5

Ni Alloy

Nickel Alloy

Against Corrosion

2N5、3N

NiCr

ニッケルクロム

Tools plating film/Low resistance film

2N5

NiCrAl

Nickel Chromium Aluminium

Low resistance film

2N5

NiCrSi

Nickel Chromium Silicon

Low resistance film

2N5

NiCu

Nickel Copper

Low resistance film

2N5

ケイ素

ケイ素

Antireflection Coating (AR)

5N

SiO2

二酸化ケイ素

Antireflection Coating (AR)

3N5

SN

錫

NCVM/ Corrosion Resistance

3N, 4N, 5N

ティ

チタン

Antireflection Coating (AR)

2N7~4N5

Ti Alloys

Titanium Alloys

Tools plating film

2N5

ティアル

チタン アルミニウム

Tool Wear-resisting

2N5

TiAlSi

Titanium Aluminium Silicon

Tool Wear-resisting

2N5

TiSi

Titanium Silicon

Tool Wear-resisting

2N5

W

Tungsten

Tools plating film

3N

WC

Tungsten Carbide

Tools plating film

3N

Zr

Zirconium

Tool Wear-resisting

2N5